Business Introduction
Business
세계 최고 수준의 증착전문기업 EQ Tech Plus
Oxidation Core Module for Semiconductor
By generating and densifying radicals at low temperatures, film generation speed can be improved and film properties such as isotropic properties, leakage current, and interfacial defect density can be maximized.
- EQ Tech Plus Core Technology
-
- 01 Radical Unit (high density)
- 02 Small Chamber Volume (Increase Radical Life, Improve Uniformity)
- 03 Activation by heat (no plasma damage)
- 04 New Precursor (Excellent Thin Film Characteristics, Cost Reduction)
- 05 Recipe Optimization (improvement of surface characteristics)