Business Introduction
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세계 최고 수준의 증착전문기업 EQ Tech Plus
Oxide Film Deposition Equipment for Power Semiconductor
Equipment for Power Device
Multi Process & Multi Wafer Loading
Significant improvements in film and interface properties contribute to customer performance.
Various processes can be responded with one system, and multiple wafers can be loaded from 100mm to 300mm.
Various processes can be responded with one system, and multiple wafers can be loaded from 100mm to 300mm.