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Company Thin Film Deposition Equipment Online Enquiry


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+82-31-291-1124
+82-70-4214-1900

Film Thickness Spec.(%) * Notes
Nitride Thin 50 ~ 500 Å ≤ 3.0 D
Thick 500 ~ 5,000 Å ≤ 3.0
Si Amorphous 500 ~ 10,000 Å ≤ 3.0 D on Oxide
Poly 500 ~ 3,000 Å ≤ 3.0
P-TEOS 500 ~ 40,000 Å ≤ 3.0 S on Oxide
P-SiON, P-SiN, P-SiO2 300 ~ 3,000 Å ≤ 3.0 S
Oxidation 30 ~ 20,000 Å ≤ 3.0 D
Tungsten (W) 100 ~ 10,000 Å ≤ 3.0 S on TiN/Oxide
LPCVD Oxide 50 ~ 500 Å ≤ 3.0 S
ACL 1,000 ~ 20,000 Å ≤ 3.0 S
PR (I-Line/KrF/ArF) 10,000 ~ 30,000 Å ≤ 3.0 S
SOH ~ 2,700 Å ≤ 3.0 S H-SOH
P.I. (Polyimide) 60,000 ~ 100,000 Å ≤ 3.0 S
PBO (Poly Benzoxazole) 60,000 ~ 90,000 Å ≤ 5.0 S
- Minimum Order Quantity : 25 pcs   - Delivery : within 4 weeks
* D : Double Side Deposition, S : Single Side Deposition
CEO : Kim Yongwon | Business Registration : 856-87-00646
HQ : #85417, Seobu-ro 2066, Jangan-gu, Suwon-si, Gyeonggi-do | Factory : 40-33, Dogok-gil, Yangseong-myeon, Anseong-si, , Gyeonggi-do
TEL : +82-31-291-1124 | FAX : +82-31-673-1124 | E-mail : info@eqtechplus.com

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