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| Film |
Thickness |
Spec.(%) |
* |
Notes |
| Nitride |
Thin |
50 ~ 500 Å |
≤ 3.0 |
D |
|
| Thick |
500 ~ 5,000 Å |
≤ 3.0 |
|
| Si |
Amorphous |
500 ~ 10,000 Å |
≤ 3.0 |
D |
on Oxide |
| Poly |
500 ~ 3,000 Å |
≤ 3.0 |
|
| P-TEOS |
500 ~ 40,000 Å |
≤ 3.0 |
S |
|
| P-SiON, P-SiN, P-SiO2 |
300 ~ 3,000 Å |
≤ 3.0 |
S |
|
| Oxidation |
30 ~ 20,000 Å |
≤ 3.0 |
D |
|
| Tungsten (W) |
100 ~ 10,000 Å |
≤ 3.0 |
S |
on TiN/Oxide |
| LPCVD Oxide |
50 ~ 500 Å |
≤ 3.0 |
S |
|
| ACL (Amorphous Carbon Layer) |
1,000 ~ 20,000 Å |
≤ 3.0 |
S |
|
| PR (I-Line/KrF/ArF) |
10,000 ~ 30,000 Å |
≤ 3.0 |
S |
|
| SOH (Spin on Hardmask) |
~ 2,700 Å |
≤ 3.0 |
S |
H-SOH |
| P.I. (Polyimide) |
60,000 ~ 100,000 Å |
≤ 3.0 |
S |
|
| PBO (Poly Benzoxazole) |
60,000 ~ 90,000 Å |
≤ 5.0 |
S |
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- Minimum Order Quantity : 25 pcs - Delivery : within 4 weeks
* D : Double Side Deposition, S : Single Side Deposition |
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